Figure Open Access
Khan, Muhammad Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, René; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan
<?xml version='1.0' encoding='utf-8'?> <resource xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://datacite.org/schema/kernel-4" xsi:schemaLocation="http://datacite.org/schema/kernel-4 http://schema.datacite.org/meta/kernel-4.1/metadata.xsd"> <identifier identifierType="DOI">10.14278/rodare.1270</identifier> <creators> <creator> <creatorName>Khan, Muhammad Bilal</creatorName> <givenName>Muhammad Bilal</givenName> <familyName>Khan</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0003-4627-9433</nameIdentifier> </creator> <creator> <creatorName>Prucnal, Slawomir</creatorName> <givenName>Slawomir</givenName> <familyName>Prucnal</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-4088-6032</nameIdentifier> </creator> <creator> <creatorName>Ghosh, Sayantan</creatorName> <givenName>Sayantan</givenName> <familyName>Ghosh</familyName> </creator> <creator> <creatorName>Deb, Dipjyoti</creatorName> <givenName>Dipjyoti</givenName> <familyName>Deb</familyName> </creator> <creator> <creatorName>Hübner, René</creatorName> <givenName>René</givenName> <familyName>Hübner</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-5200-6928</nameIdentifier> </creator> <creator> <creatorName>Pohl, Darius</creatorName> <givenName>Darius</givenName> <familyName>Pohl</familyName> <affiliation>Dresden Center for Nanoanalysis (DCN), CfAED, TU Dresden</affiliation> </creator> <creator> <creatorName>Rebohle, Lars</creatorName> <givenName>Lars</givenName> <familyName>Rebohle</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-8066-6392</nameIdentifier> </creator> <creator> <creatorName>Mikolajick, Thomas</creatorName> <givenName>Thomas</givenName> <familyName>Mikolajick</familyName> <affiliation>Namlab gGmbH, Nöthnitzer Strasse 64, Dresden, 01187, Germany</affiliation> </creator> <creator> <creatorName>Erbe, Artur</creatorName> <givenName>Artur</givenName> <familyName>Erbe</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-6368-8728</nameIdentifier> </creator> <creator> <creatorName>Georgiev, Yordan</creatorName> <givenName>Yordan</givenName> <familyName>Georgiev</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-3146-8031</nameIdentifier> </creator> </creators> <titles> <title>Data publication: Controlled Silicidation of SiNW using FLA</title> </titles> <publisher>Rodare</publisher> <publicationYear>2021</publicationYear> <dates> <date dateType="Issued">2021-11-23</date> </dates> <resourceType resourceTypeGeneral="Image">Figure</resourceType> <alternateIdentifiers> <alternateIdentifier alternateIdentifierType="url">https://rodare.hzdr.de/record/1270</alternateIdentifier> </alternateIdentifiers> <relatedIdentifiers> <relatedIdentifier relatedIdentifierType="URL" relationType="IsReferencedBy">https://www.hzdr.de/publications/Publ-33436</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsIdenticalTo">https://www.hzdr.de/publications/Publ-33452</relatedIdentifier> <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.14278/rodare.1269</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/rodare</relatedIdentifier> </relatedIdentifiers> <rightsList> <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights> <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights> </rightsList> <descriptions> <description descriptionType="Abstract"><p>The folder contains the following:&nbsp;1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.</p></description> </descriptions> </resource>
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