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Data publication: Controlled Silicidation of SiNW using FLA

Khan, Muhammad Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, René; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan


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  <identifier identifierType="DOI">10.14278/rodare.1270</identifier>
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      <creatorName>Khan, Muhammad Bilal</creatorName>
      <givenName>Muhammad Bilal</givenName>
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      <creatorName>Prucnal, Slawomir</creatorName>
      <givenName>Slawomir</givenName>
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      <creatorName>Ghosh, Sayantan</creatorName>
      <givenName>Sayantan</givenName>
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      <creatorName>Deb, Dipjyoti</creatorName>
      <givenName>Dipjyoti</givenName>
      <familyName>Deb</familyName>
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    <creator>
      <creatorName>Hübner, René</creatorName>
      <givenName>René</givenName>
      <familyName>Hübner</familyName>
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    </creator>
    <creator>
      <creatorName>Pohl, Darius</creatorName>
      <givenName>Darius</givenName>
      <familyName>Pohl</familyName>
      <affiliation>Dresden Center for Nanoanalysis (DCN), CfAED, TU Dresden</affiliation>
    </creator>
    <creator>
      <creatorName>Rebohle, Lars</creatorName>
      <givenName>Lars</givenName>
      <familyName>Rebohle</familyName>
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    </creator>
    <creator>
      <creatorName>Mikolajick, Thomas</creatorName>
      <givenName>Thomas</givenName>
      <familyName>Mikolajick</familyName>
      <affiliation>Namlab gGmbH, Nöthnitzer Strasse 64, Dresden, 01187, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Erbe, Artur</creatorName>
      <givenName>Artur</givenName>
      <familyName>Erbe</familyName>
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    <creator>
      <creatorName>Georgiev, Yordan</creatorName>
      <givenName>Yordan</givenName>
      <familyName>Georgiev</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-3146-8031</nameIdentifier>
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  </creators>
  <titles>
    <title>Data publication: Controlled Silicidation of SiNW using FLA</title>
  </titles>
  <publisher>Rodare</publisher>
  <publicationYear>2021</publicationYear>
  <dates>
    <date dateType="Issued">2021-11-23</date>
  </dates>
  <resourceType resourceTypeGeneral="Image">Figure</resourceType>
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  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;The folder contains the following:&amp;nbsp;1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.&lt;/p&gt;</description>
  </descriptions>
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