Figure Open Access

Data publication: Controlled Silicidation of SiNW using FLA

Khan, Muhammad Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, René; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan


JSON Export

{
  "files": [
    {
      "size": 6992873, 
      "links": {
        "self": "https://rodare.hzdr.de/api/files/19842802-a817-4de8-be99-3b5bce18c3ef/FLA-Images.zip"
      }, 
      "checksum": "md5:be300504e2319fcbd054fedcf5bc7c4c", 
      "type": "zip", 
      "bucket": "19842802-a817-4de8-be99-3b5bce18c3ef", 
      "key": "FLA-Images.zip"
    }
  ], 
  "doi": "10.14278/rodare.1270", 
  "revision": 2, 
  "metadata": {
    "pub_id": "33452", 
    "keywords": [], 
    "communities": [
      {
        "id": "rodare"
      }
    ], 
    "access_right_category": "success", 
    "title": "Data publication: Controlled Silicidation of SiNW using FLA", 
    "doc_id": "1", 
    "access_right": "open", 
    "relations": {
      "version": [
        {
          "last_child": {
            "pid_type": "recid", 
            "pid_value": "1270"
          }, 
          "index": 0, 
          "is_last": true, 
          "count": 1, 
          "parent": {
            "pid_type": "recid", 
            "pid_value": "1269"
          }
        }
      ]
    }, 
    "description": "<p>The folder contains the following:&nbsp;1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.</p>", 
    "related_identifiers": [
      {
        "identifier": "https://www.hzdr.de/publications/Publ-33436", 
        "relation": "isReferencedBy", 
        "scheme": "url"
      }, 
      {
        "identifier": "https://www.hzdr.de/publications/Publ-33452", 
        "relation": "isIdenticalTo", 
        "scheme": "url"
      }, 
      {
        "identifier": "10.14278/rodare.1269", 
        "relation": "isVersionOf", 
        "scheme": "doi"
      }
    ], 
    "license": {
      "id": "CC-BY-4.0"
    }, 
    "creators": [
      {
        "name": "Khan, Muhammad Bilal", 
        "orcid": "0000-0003-4627-9433"
      }, 
      {
        "name": "Prucnal, Slawomir", 
        "orcid": "0000-0002-4088-6032"
      }, 
      {
        "name": "Ghosh, Sayantan"
      }, 
      {
        "name": "Deb, Dipjyoti"
      }, 
      {
        "name": "H\u00fcbner, Ren\u00e9", 
        "orcid": "0000-0002-5200-6928"
      }, 
      {
        "name": "Pohl, Darius", 
        "affiliation": "Dresden Center for Nanoanalysis (DCN), CfAED, TU Dresden"
      }, 
      {
        "name": "Rebohle, Lars", 
        "orcid": "0000-0002-8066-6392"
      }, 
      {
        "name": "Mikolajick, Thomas", 
        "affiliation": "Namlab gGmbH, N\u00f6thnitzer Strasse 64, Dresden, 01187, Germany"
      }, 
      {
        "name": "Erbe, Artur", 
        "orcid": "0000-0001-6368-8728"
      }, 
      {
        "name": "Georgiev, Yordan", 
        "orcid": "0000-0002-3146-8031"
      }
    ], 
    "doi": "10.14278/rodare.1270", 
    "resource_type": {
      "type": "image", 
      "subtype": "figure", 
      "title": "Figure"
    }, 
    "publication_date": "2021-11-23"
  }, 
  "links": {
    "badge": "https://rodare.hzdr.de/badge/doi/10.14278/rodare.1270.svg", 
    "doi": "https://doi.org/10.14278/rodare.1270", 
    "conceptbadge": "https://rodare.hzdr.de/badge/doi/10.14278/rodare.1269.svg", 
    "conceptdoi": "https://doi.org/10.14278/rodare.1269", 
    "bucket": "https://rodare.hzdr.de/api/files/19842802-a817-4de8-be99-3b5bce18c3ef", 
    "html": "https://rodare.hzdr.de/record/1270", 
    "latest": "https://rodare.hzdr.de/api/records/1270", 
    "latest_html": "https://rodare.hzdr.de/record/1270"
  }, 
  "id": 1270, 
  "updated": "2021-11-25T07:51:09.562281+00:00", 
  "conceptrecid": "1269", 
  "created": "2021-11-23T13:08:37.200384+00:00", 
  "conceptdoi": "10.14278/rodare.1269", 
  "stats": {
    "volume": 41957238.0, 
    "unique_downloads": 6.0, 
    "version_unique_downloads": 6.0, 
    "unique_views": 155.0, 
    "downloads": 6.0, 
    "version_unique_views": 155.0, 
    "version_views": 218.0, 
    "version_downloads": 6.0, 
    "version_volume": 41957238.0, 
    "views": 218.0
  }, 
  "owners": [
    480
  ]
}
218
6
views
downloads
All versions This version
Views 218218
Downloads 66
Data volume 42.0 MB42.0 MB
Unique views 155155
Unique downloads 66

Share

Cite as