Figure Open Access
Data publication: Controlled Silicidation of SiNW using FLA
Khan, Muhammad Bilal;
Prucnal, Slawomir;
Ghosh, Sayantan;
Deb, Dipjyoti;
Hübner, René;
Pohl, Darius;
Rebohle, Lars;
Mikolajick, Thomas;
Erbe, Artur;
Georgiev, Yordan
The folder contains the following: 1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.
Files
(7.0 MB)
| Name | Size | |
|---|---|---|
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FLA-Images.zip
md5:be300504e2319fcbd054fedcf5bc7c4c |
7.0 MB | Download |
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| All versions | This version | |
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| Views | 508 | 508 |
| Downloads | 9 | 9 |
| Data volume | 62.9 MB | 62.9 MB |
| Unique views | 368 | 368 |
| Unique downloads | 9 | 9 |
- Publication date:
- November 23, 2021
- DOI:
-
- Related identifiers:
- Identical to:
https://www.hzdr.de/publications/Publ-33452 - Referenced by:
https://www.hzdr.de/publications/Publ-33436 - Communities:
- License (for files):
- Creative Commons Attribution 4.0 International
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Cite as
Khan, Muhammad Bilal, Prucnal, Slawomir, Ghosh, Sayantan, Deb, Dipjyoti, Hübner, René, Pohl, Darius, … Georgiev, Yordan. (2021, November 23). Data publication: Controlled Silicidation of SiNW using FLA. Rodare. http://doi.org/10.14278/rodare.1270
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