Dataset Open Access

RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"

Mientus, R.; Weise, M.; Seeger, S.; Heller, R.; Ellmer, K.


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  <dc:creator>Mientus, R.</dc:creator>
  <dc:creator>Weise, M.</dc:creator>
  <dc:creator>Seeger, S.</dc:creator>
  <dc:creator>Heller, R.</dc:creator>
  <dc:creator>Ellmer, K.</dc:creator>
  <dc:date>2020-02-26</dc:date>
  <dc:description>Raw data for pub. "Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"</dc:description>
  <dc:identifier>https://rodare.hzdr.de/record/648</dc:identifier>
  <dc:identifier>10.14278/rodare.648</dc:identifier>
  <dc:identifier>oai:rodare.hzdr.de:648</dc:identifier>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-31840</dc:relation>
  <dc:relation>url:https://www.hzdr.de/publications/Publ-31838</dc:relation>
  <dc:relation>doi:10.14278/rodare.647</dc:relation>
  <dc:relation>url:https://rodare.hzdr.de/communities/rodare</dc:relation>
  <dc:rights>info:eu-repo/semantics/openAccess</dc:rights>
  <dc:rights>https://creativecommons.org/licenses/by/4.0/legalcode</dc:rights>
  <dc:title>RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"</dc:title>
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