Dataset Open Access
Mientus, R.; Weise, M.; Seeger, S.; Heller, R.; Ellmer, K.
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<dct:title>RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"</dct:title>
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<dct:description><p>Raw data for pub. &quot;Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas&quot;</p></dct:description>
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