Dataset Open Access

RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"

Mientus, R.; Weise, M.; Seeger, S.; Heller, R.; Ellmer, K.

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{
  "DOI": "10.14278/rodare.648", 
  "abstract": "<p>Raw data for pub. &quot;Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas&quot;</p>", 
  "publisher": "Rodare", 
  "author": [
    {
      "family": "Mientus, R."
    }, 
    {
      "family": "Weise, M."
    }, 
    {
      "family": "Seeger, S."
    }, 
    {
      "family": "Heller, R."
    }, 
    {
      "family": "Ellmer, K."
    }
  ], 
  "type": "dataset", 
  "title": "RBS Raw data for publication: \"\"Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas\"", 
  "issued": {
    "date-parts": [
      [
        2020, 
        2, 
        26
      ]
    ]
  }, 
  "id": "648"
}
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Publication date:
February 26, 2020
DOI:
10.14278/rodare.648

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10.14278/rodare.648

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Related identifiers:
Identical to:
https://www.hzdr.de/publications/Publ-31840
Referenced by:
https://www.hzdr.de/publications/Publ-31838
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License (for files):
Creative Commons Attribution 4.0 International

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Version 1 10.14278/rodare.648 Feb 26, 2020
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