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RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"

Mientus, R.; Weise, M.; Seeger, S.; Heller, R.; Ellmer, K.


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{
  "description": "<p>Raw data for pub. &quot;Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas&quot;</p>", 
  "datePublished": "2020-02-26", 
  "@id": "https://doi.org/10.14278/rodare.648", 
  "name": "RBS Raw data for publication: \"\"Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas\"", 
  "identifier": "https://doi.org/10.14278/rodare.648", 
  "@type": "Dataset", 
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  "creator": [
    {
      "@type": "Person", 
      "name": "Mientus, R."
    }, 
    {
      "@type": "Person", 
      "name": "Weise, M."
    }, 
    {
      "@type": "Person", 
      "name": "Seeger, S."
    }, 
    {
      "@type": "Person", 
      "name": "Heller, R."
    }, 
    {
      "@type": "Person", 
      "name": "Ellmer, K."
    }
  ], 
  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
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  "url": "https://rodare.hzdr.de/record/648", 
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