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RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"

Mientus, R.; Weise, M.; Seeger, S.; Heller, R.; Ellmer, K.


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  "datePublished": "2020-02-26", 
  "name": "RBS Raw data for publication: \"\"Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas\"", 
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