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RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"

Mientus, R.; Weise, M.; Seeger, S.; Heller, R.; Ellmer, K.

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@misc{mientus_r_2020_648,
  author       = {Mientus, R. and
                  Weise, M. and
                  Seeger, S. and
                  Heller, R. and
                  Ellmer, K.},
  title        = {{RBS Raw data for publication: ""Electrical and 
                   Optical Properties of Amorphous SnO2:Ta Films,
                   Prepared by DC and RF Magnetron Sputtering: A
                   Systematic Study of the Influence of the Type of
                   the Reactive Gas"}},
  month        = feb,
  year         = 2020,
  doi          = {10.14278/rodare.648},
  url          = {https://doi.org/10.14278/rodare.648}
}
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Publication date:
February 26, 2020
DOI:
10.14278/rodare.648

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10.14278/rodare.648

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https://www.hzdr.de/publications/Publ-31840
Referenced by:
https://www.hzdr.de/publications/Publ-31838
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Creative Commons Attribution 4.0 International

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