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RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"

Mientus, R.; Weise, M.; Seeger, S.; Heller, R.; Ellmer, K.

Raw data for pub. "Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"

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Publication date:
February 26, 2020
DOI:
10.14278/rodare.648

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10.14278/rodare.648

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https://www.hzdr.de/publications/Publ-31840
Referenced by:
https://www.hzdr.de/publications/Publ-31838
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Version 1 10.14278/rodare.648 Feb 26, 2020
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