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Data publication: Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a com- parison with Ga+ and e− beams

Herrer, Lucía; Hlawacek, Gregor


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  <dc:creator>Herrer, Lucía</dc:creator>
  <dc:creator>Hlawacek, Gregor</dc:creator>
  <dc:date>2024-10-25</dc:date>
  <dc:description>All Images produced by the Helium Ion Microscope (*.czi) including the pattering files created by NPVE from FIBICS (tif and xml)</dc:description>
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  <dc:title>Data publication: Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a com- parison with Ga+ and e− beams</dc:title>
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