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Data publication: Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a com- parison with Ga+ and e− beams

Herrer, Lucía; Hlawacek, Gregor


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      <creatorName>Herrer, Lucía</creatorName>
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  <titles>
    <title>Data publication: Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a com- parison with Ga+ and e− beams</title>
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  <publisher>Rodare</publisher>
  <publicationYear>2024</publicationYear>
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    <description descriptionType="Abstract">&lt;p&gt;All Images produced by the Helium Ion Microscope (*.czi) including the pattering files created by NPVE from FIBICS (tif and xml)&lt;/p&gt;</description>
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