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Data publication: Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a com- parison with Ga+ and e− beams

Herrer, Lucía; Hlawacek, Gregor


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@misc{herrer_lucia_2024_3229,
  author       = {Herrer, Lucía and
                  Hlawacek, Gregor},
  title        = {{Data publication: Fabrication of palladium- 
                   enriched metallic structures by direct focused He+
                   and Ne+ beam nanowriting from organometallic thin
                   films: a com- parison with Ga+ and e− beams}},
  month        = oct,
  year         = 2024,
  doi          = {10.14278/rodare.3229},
  url          = {https://doi.org/10.14278/rodare.3229}
}
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