October 25, 2024 Figure Open Access

Herrer, Lucía; Hlawacek, Gregor

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{
  "name": "Data publication: Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a com- parison with Ga+ and e\u2212 beams", 
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  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
  "identifier": "https://doi.org/10.14278/rodare.3229", 
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      "name": "Herrer, Luc\u00eda", 
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      "name": "Hlawacek, Gregor", 
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  "url": "https://rodare.hzdr.de/record/3229", 
  "datePublished": "2024-10-25", 
  "description": "<p>All Images produced by the Helium Ion Microscope (*.czi) including the pattering files created by NPVE from FIBICS (tif and xml)</p>"
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