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Data publication: Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a com- parison with Ga+ and e− beams

Herrer, Lucía; Hlawacek, Gregor

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{
  "author": [
    {
      "family": "Herrer, Luc\u00eda"
    }, 
    {
      "family": "Hlawacek, Gregor"
    }
  ], 
  "issued": {
    "date-parts": [
      [
        2024, 
        10, 
        25
      ]
    ]
  }, 
  "title": "Data publication: Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a com- parison with Ga+ and e\u2212 beams", 
  "abstract": "<p>All Images produced by the Helium Ion Microscope (*.czi) including the pattering files created by NPVE from FIBICS (tif and xml)</p>", 
  "type": "figure", 
  "id": "3229", 
  "DOI": "10.14278/rodare.3229", 
  "publisher": "Rodare"
}
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Publication date:
October 25, 2024
DOI:
10.14278/rodare.3229

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10.14278/rodare.3229

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Related identifiers:
Cites:
10.17815/jlsrf-3-159
Identical to:
https://www.hzdr.de/publications/Publ-39807
Referenced by:
10.1039/d4nr02680b, https://www.hzdr.de/publications/Publ-39806
Communities:
License (for files):
Creative Commons Attribution 4.0 International

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