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Steuer, Oliver; Schwarz, Daniel; Oehme, Michael; Bärwolf, Florian; Cheng, Yu; Ganss, Fabian; Hübner, René; Heller, René; Zhou, Shengqiang; Helm, Manfred; Cuniberti, Gianaurelio; Georgiev, Yordan; Prucnal, Slawomir
<?xml version='1.0' encoding='utf-8'?> <resource xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://datacite.org/schema/kernel-4" xsi:schemaLocation="http://datacite.org/schema/kernel-4 http://schema.datacite.org/meta/kernel-4.1/metadata.xsd"> <identifier identifierType="DOI">10.14278/rodare.3086</identifier> <creators> <creator> <creatorName>Steuer, Oliver</creatorName> <givenName>Oliver</givenName> <familyName>Steuer</familyName> </creator> <creator> <creatorName>Schwarz, Daniel</creatorName> <givenName>Daniel</givenName> <familyName>Schwarz</familyName> <affiliation>University of Stuttgart, Institute of Semiconductor Engineering, Pfaffenwaldring 47, 70569 Stuttgart, Germany</affiliation> </creator> <creator> <creatorName>Oehme, Michael</creatorName> <givenName>Michael</givenName> <familyName>Oehme</familyName> <affiliation>University of Stuttgart, Institute of Semiconductor Engineering, Pfaffenwaldring 47, 70569 Stuttgart, Germany</affiliation> </creator> <creator> <creatorName>Bärwolf, Florian</creatorName> <givenName>Florian</givenName> <familyName>Bärwolf</familyName> <affiliation>IHP - Leibniz-Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany</affiliation> </creator> <creator> <creatorName>Cheng, Yu</creatorName> <givenName>Yu</givenName> <familyName>Cheng</familyName> </creator> <creator> <creatorName>Ganss, Fabian</creatorName> <givenName>Fabian</givenName> <familyName>Ganss</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0009-0003-0366-9690</nameIdentifier> </creator> <creator> <creatorName>Hübner, René</creatorName> <givenName>René</givenName> <familyName>Hübner</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-5200-6928</nameIdentifier> </creator> <creator> <creatorName>Heller, René</creatorName> <givenName>René</givenName> <familyName>Heller</familyName> </creator> <creator> <creatorName>Zhou, Shengqiang</creatorName> <givenName>Shengqiang</givenName> <familyName>Zhou</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-4885-799X</nameIdentifier> </creator> <creator> <creatorName>Helm, Manfred</creatorName> <givenName>Manfred</givenName> <familyName>Helm</familyName> </creator> <creator> <creatorName>Cuniberti, Gianaurelio</creatorName> <givenName>Gianaurelio</givenName> <familyName>Cuniberti</familyName> <affiliation>Institute of Materials Science, Technische Universität Dresden, Budapester Str. 27, 01069 Dresden, Germany</affiliation> </creator> <creator> <creatorName>Georgiev, Yordan</creatorName> <givenName>Yordan</givenName> <familyName>Georgiev</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-3146-8031</nameIdentifier> </creator> <creator> <creatorName>Prucnal, Slawomir</creatorName> <givenName>Slawomir</givenName> <familyName>Prucnal</familyName> <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-4088-6032</nameIdentifier> </creator> </creators> <titles> <title>Data publication: Structural changes in Ge1 xSnx and Si1-x-yGexSny thin films on SOI substrates treated by pulse laser annealing</title> </titles> <publisher>Rodare</publisher> <publicationYear>2024</publicationYear> <dates> <date dateType="Issued">2024-08-14</date> </dates> <resourceType resourceTypeGeneral="Dataset"/> <alternateIdentifiers> <alternateIdentifier alternateIdentifierType="url">https://rodare.hzdr.de/record/3086</alternateIdentifier> </alternateIdentifiers> <relatedIdentifiers> <relatedIdentifier relatedIdentifierType="DOI" relationType="Cites">10.17815/jlsrf-3-159</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsIdenticalTo">https://www.hzdr.de/publications/Publ-38905</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsReferencedBy">https://www.hzdr.de/publications/Publ-38902</relatedIdentifier> <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.14278/rodare.3085</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/fwi</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/ibc</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/rodare</relatedIdentifier> </relatedIdentifiers> <rightsList> <rights rightsURI="info:eu-repo/semantics/restrictedAccess">Restricted Access</rights> </rightsList> <descriptions> <description descriptionType="Abstract"><p>Messdaten f&uuml;r das Paper</p></description> </descriptions> </resource>
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