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Data publication: Structural changes in Ge1 xSnx and Si1-x-yGexSny thin films on SOI substrates treated by pulse laser annealing

Steuer, Oliver; Schwarz, Daniel; Oehme, Michael; Bärwolf, Florian; Cheng, Yu; Ganss, Fabian; Hübner, René; Heller, René; Zhou, Shengqiang; Helm, Manfred; Cuniberti, Gianaurelio; Georgiev, Yordan; Prucnal, Slawomir

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