June 12, 2024 Dataset Closed Access

Steuer, Oliver; Michailow, Michail; Hübner, René; Pyszniak, Krzysztof; Turek, Marcin; Kentsch, Ulrich; Ganss, Fabian; Khan, Muhammad Moazzam; Rebohle, Lars; Zhou, Shengqiang; Knoch, Joachim; Helm, Manfred; Cuniberti, Gianaurelio; Georgiev, Yordan; Prucnal, Slawomir

MARC21 XML Export

<?xml version='1.0' encoding='UTF-8'?>
<record xmlns="http://www.loc.gov/MARC21/slim">
  <leader>00000nmm##2200000uu#4500</leader>
  <datafield tag="024" ind1=" " ind2=" ">
    <subfield code="a">10.14278/rodare.3016</subfield>
    <subfield code="2">doi</subfield>
  </datafield>
  <datafield tag="100" ind1=" " ind2=" ">
    <subfield code="a">Steuer, Oliver</subfield>
  </datafield>
  <controlfield tag="001">3016</controlfield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Michailow, Michail</subfield>
    <subfield code="u">Institute of Semiconductor Electronics, Rheinisch-Westfälische Technische Hochschule Aachen, 52074 Aachen, Germany</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Hübner, René</subfield>
    <subfield code="0">(orcid)0000-0002-5200-6928</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Pyszniak, Krzysztof</subfield>
    <subfield code="u">Institute of Physics, Maria Curie-Sklodowska University in Lublin, M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Turek, Marcin</subfield>
    <subfield code="u">Institute of Physics, Maria Curie-Sklodowska University in Lublin, M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Kentsch, Ulrich</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Ganss, Fabian</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Khan, Muhammad Moazzam</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Rebohle, Lars</subfield>
    <subfield code="0">(orcid)0000-0002-8066-6392</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Zhou, Shengqiang</subfield>
    <subfield code="0">(orcid)0000-0002-4885-799X</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Knoch, Joachim</subfield>
    <subfield code="u">Institute of Semiconductor Electronics, Rheinisch-Westfälische Technische Hochschule Aachen, 52074 Aachen, Germany</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Helm, Manfred</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Cuniberti, Gianaurelio</subfield>
    <subfield code="u">Institute of Materials Science and Max Bergmann Center, Technische Universität Dresden, 01069 Dresden, Germany</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Georgiev, Yordan</subfield>
    <subfield code="0">(orcid)0000-0002-3146-8031</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="a">Prucnal, Slawomir</subfield>
    <subfield code="0">(orcid)0000-0002-4088-6032</subfield>
  </datafield>
  <datafield tag="542" ind1=" " ind2=" ">
    <subfield code="l">closed</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Implantation</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">SiGeSn</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Si1-x-yGeySnx</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Sn</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">FLA</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Flash lamp annealing</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">10.17815/jlsrf-3-159</subfield>
    <subfield code="i">cites</subfield>
    <subfield code="n">doi</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">https://www.hzdr.de/publications/Publ-39199</subfield>
    <subfield code="i">isIdenticalTo</subfield>
    <subfield code="n">url</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">https://www.hzdr.de/publications/Publ-39097</subfield>
    <subfield code="i">isReferencedBy</subfield>
    <subfield code="n">url</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="a">10.14278/rodare.3015</subfield>
    <subfield code="i">isVersionOf</subfield>
    <subfield code="n">doi</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">dataset</subfield>
  </datafield>
  <datafield tag="909" ind1="C" ind2="O">
    <subfield code="o">oai:rodare.hzdr.de:3016</subfield>
    <subfield code="p">openaire_data</subfield>
    <subfield code="p">user-rodare</subfield>
    <subfield code="p">user-fwi</subfield>
    <subfield code="p">user-ibc</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-fwi</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-ibc</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">user-rodare</subfield>
  </datafield>
  <datafield tag="520" ind1=" " ind2=" ">
    <subfield code="a">&lt;p&gt;Bei diesem Datensatz handelt es sich um die im Paper beschriebenen &amp;micro;Raman, RBS und TEM Daten sowie die SRIM Simulationen&lt;/p&gt;</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="c">2024-06-12</subfield>
  </datafield>
  <controlfield tag="005">20240812092207.0</controlfield>
  <datafield tag="245" ind1=" " ind2=" ">
    <subfield code="a">Si1-x-yGeySnx alloy formation by Sn ion implantation and flash lamp annealing</subfield>
  </datafield>
</record>