June 12, 2024 Dataset Closed Access

Steuer, Oliver; Michailow, Michail; Hübner, René; Pyszniak, Krzysztof; Turek, Marcin; Kentsch, Ulrich; Ganss, Fabian; Khan, Muhammad Moazzam; Rebohle, Lars; Zhou, Shengqiang; Knoch, Joachim; Helm, Manfred; Cuniberti, Gianaurelio; Georgiev, Yordan; Prucnal, Slawomir

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{
  "name": "Si1-x-yGeySnx alloy formation by Sn ion implantation and flash lamp annealing", 
  "description": "<p>Bei diesem Datensatz handelt es sich um die im Paper beschriebenen &micro;Raman, RBS und TEM Daten sowie die SRIM Simulationen</p>", 
  "datePublished": "2024-06-12", 
  "citation": [
    {
      "@type": "CreativeWork", 
      "@id": "https://doi.org/10.17815/jlsrf-3-159"
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  "@context": "https://schema.org/", 
  "creator": [
    {
      "name": "Steuer, Oliver", 
      "@type": "Person"
    }, 
    {
      "affiliation": "Institute of Semiconductor Electronics, Rheinisch-Westf\u00e4lische Technische Hochschule Aachen, 52074 Aachen, Germany", 
      "name": "Michailow, Michail", 
      "@type": "Person"
    }, 
    {
      "name": "H\u00fcbner, Ren\u00e9", 
      "@id": "https://orcid.org/0000-0002-5200-6928", 
      "@type": "Person"
    }, 
    {
      "affiliation": "Institute of Physics, Maria Curie-Sklodowska University in Lublin, M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland", 
      "name": "Pyszniak, Krzysztof", 
      "@type": "Person"
    }, 
    {
      "affiliation": "Institute of Physics, Maria Curie-Sklodowska University in Lublin, M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland", 
      "name": "Turek, Marcin", 
      "@type": "Person"
    }, 
    {
      "name": "Kentsch, Ulrich", 
      "@type": "Person"
    }, 
    {
      "name": "Ganss, Fabian", 
      "@type": "Person"
    }, 
    {
      "name": "Khan, Muhammad Moazzam", 
      "@type": "Person"
    }, 
    {
      "name": "Rebohle, Lars", 
      "@id": "https://orcid.org/0000-0002-8066-6392", 
      "@type": "Person"
    }, 
    {
      "name": "Zhou, Shengqiang", 
      "@id": "https://orcid.org/0000-0002-4885-799X", 
      "@type": "Person"
    }, 
    {
      "affiliation": "Institute of Semiconductor Electronics, Rheinisch-Westf\u00e4lische Technische Hochschule Aachen, 52074 Aachen, Germany", 
      "name": "Knoch, Joachim", 
      "@type": "Person"
    }, 
    {
      "name": "Helm, Manfred", 
      "@type": "Person"
    }, 
    {
      "affiliation": "Institute of Materials Science and Max Bergmann Center, Technische Universit\u00e4t Dresden, 01069 Dresden, Germany", 
      "name": "Cuniberti, Gianaurelio", 
      "@type": "Person"
    }, 
    {
      "name": "Georgiev, Yordan", 
      "@id": "https://orcid.org/0000-0002-3146-8031", 
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    }, 
    {
      "name": "Prucnal, Slawomir", 
      "@id": "https://orcid.org/0000-0002-4088-6032", 
      "@type": "Person"
    }
  ], 
  "url": "https://rodare.hzdr.de/record/3016", 
  "@type": "Dataset", 
  "@id": "https://doi.org/10.14278/rodare.3016", 
  "identifier": "https://doi.org/10.14278/rodare.3016", 
  "sameAs": [
    "https://www.hzdr.de/publications/Publ-39199"
  ], 
  "keywords": [
    "Implantation", 
    "SiGeSn", 
    "Si1-x-yGeySnx", 
    "Sn", 
    "FLA", 
    "Flash lamp annealing"
  ]
}