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Si1-x-yGeySnx alloy formation by Sn ion implantation and flash lamp annealing

Steuer, Oliver; Michailow, Michail; Hübner, René; Pyszniak, Krzysztof; Turek, Marcin; Kentsch, Ulrich; Ganss, Fabian; Khan, Muhammad Moazzam; Rebohle, Lars; Zhou, Shengqiang; Knoch, Joachim; Helm, Manfred; Cuniberti, Gianaurelio; Georgiev, Yordan; Prucnal, Slawomir

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@misc{steuer_oliver_2024_3016,
  author       = {Steuer, Oliver and
                  Michailow, Michail and
                  Hübner, René and
                  Pyszniak, Krzysztof and
                  Turek, Marcin and
                  Kentsch, Ulrich and
                  Ganss, Fabian and
                  Khan, Muhammad Moazzam and
                  Rebohle, Lars and
                  Zhou, Shengqiang and
                  Knoch, Joachim and
                  Helm, Manfred and
                  Cuniberti, Gianaurelio and
                  Georgiev, Yordan and
                  Prucnal, Slawomir},
  title        = {{Si1-x-yGeySnx alloy formation by Sn ion 
                   implantation and flash lamp annealing}},
  month        = jun,
  year         = 2024,
  doi          = {10.14278/rodare.3016},
  url          = {https://doi.org/10.14278/rodare.3016}
}
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Publication date:
June 12, 2024
DOI:
10.14278/rodare.3016

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10.14278/rodare.3016

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Keyword(s):
Implantation SiGeSn Si1-x-yGeySnx Sn FLA Flash lamp annealing
Related identifiers:
Cites:
10.17815/jlsrf-3-159
Identical to:
https://www.hzdr.de/publications/Publ-39199
Referenced by:
https://www.hzdr.de/publications/Publ-39097
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Version 1 10.14278/rodare.3016 Jun 12, 2024
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