June 12, 2024 Dataset Closed Access

Steuer, Oliver; Michailow, Michail; Hübner, René; Pyszniak, Krzysztof; Turek, Marcin; Kentsch, Ulrich; Ganss, Fabian; Khan, Muhammad Moazzam; Rebohle, Lars; Zhou, Shengqiang; Knoch, Joachim; Helm, Manfred; Cuniberti, Gianaurelio; Georgiev, Yordan; Prucnal, Slawomir

DataCite XML Export

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  <identifier identifierType="DOI">10.14278/rodare.3016</identifier>
  <creators>
    <creator>
      <creatorName>Steuer, Oliver</creatorName>
      <givenName>Oliver</givenName>
      <familyName>Steuer</familyName>
    </creator>
    <creator>
      <creatorName>Michailow, Michail</creatorName>
      <givenName>Michail</givenName>
      <familyName>Michailow</familyName>
      <affiliation>Institute of Semiconductor Electronics, Rheinisch-Westfälische Technische Hochschule Aachen, 52074 Aachen, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Hübner, René</creatorName>
      <givenName>René</givenName>
      <familyName>Hübner</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-5200-6928</nameIdentifier>
    </creator>
    <creator>
      <creatorName>Pyszniak, Krzysztof</creatorName>
      <givenName>Krzysztof</givenName>
      <familyName>Pyszniak</familyName>
      <affiliation>Institute of Physics, Maria Curie-Sklodowska University in Lublin, M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland</affiliation>
    </creator>
    <creator>
      <creatorName>Turek, Marcin</creatorName>
      <givenName>Marcin</givenName>
      <familyName>Turek</familyName>
      <affiliation>Institute of Physics, Maria Curie-Sklodowska University in Lublin, M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland</affiliation>
    </creator>
    <creator>
      <creatorName>Kentsch, Ulrich</creatorName>
      <givenName>Ulrich</givenName>
      <familyName>Kentsch</familyName>
    </creator>
    <creator>
      <creatorName>Ganss, Fabian</creatorName>
      <givenName>Fabian</givenName>
      <familyName>Ganss</familyName>
    </creator>
    <creator>
      <creatorName>Khan, Muhammad Moazzam</creatorName>
      <givenName>Muhammad Moazzam</givenName>
      <familyName>Khan</familyName>
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    <creator>
      <creatorName>Rebohle, Lars</creatorName>
      <givenName>Lars</givenName>
      <familyName>Rebohle</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-8066-6392</nameIdentifier>
    </creator>
    <creator>
      <creatorName>Zhou, Shengqiang</creatorName>
      <givenName>Shengqiang</givenName>
      <familyName>Zhou</familyName>
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    <creator>
      <creatorName>Knoch, Joachim</creatorName>
      <givenName>Joachim</givenName>
      <familyName>Knoch</familyName>
      <affiliation>Institute of Semiconductor Electronics, Rheinisch-Westfälische Technische Hochschule Aachen, 52074 Aachen, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Helm, Manfred</creatorName>
      <givenName>Manfred</givenName>
      <familyName>Helm</familyName>
    </creator>
    <creator>
      <creatorName>Cuniberti, Gianaurelio</creatorName>
      <givenName>Gianaurelio</givenName>
      <familyName>Cuniberti</familyName>
      <affiliation>Institute of Materials Science and Max Bergmann Center, Technische Universität Dresden, 01069 Dresden, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Georgiev, Yordan</creatorName>
      <givenName>Yordan</givenName>
      <familyName>Georgiev</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-3146-8031</nameIdentifier>
    </creator>
    <creator>
      <creatorName>Prucnal, Slawomir</creatorName>
      <givenName>Slawomir</givenName>
      <familyName>Prucnal</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-4088-6032</nameIdentifier>
    </creator>
  </creators>
  <titles>
    <title>Si1-x-yGeySnx alloy formation by Sn ion implantation and flash lamp annealing</title>
  </titles>
  <publisher>Rodare</publisher>
  <publicationYear>2024</publicationYear>
  <subjects>
    <subject>Implantation</subject>
    <subject>SiGeSn</subject>
    <subject>Si1-x-yGeySnx</subject>
    <subject>Sn</subject>
    <subject>FLA</subject>
    <subject>Flash lamp annealing</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2024-06-12</date>
  </dates>
  <resourceType resourceTypeGeneral="Dataset"/>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://rodare.hzdr.de/record/3016</alternateIdentifier>
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  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="Cites">10.17815/jlsrf-3-159</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsIdenticalTo">https://www.hzdr.de/publications/Publ-39199</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsReferencedBy">https://www.hzdr.de/publications/Publ-39097</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.14278/rodare.3015</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/fwi</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/ibc</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/rodare</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="info:eu-repo/semantics/closedAccess">Closed Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;Bei diesem Datensatz handelt es sich um die im Paper beschriebenen &amp;micro;Raman, RBS und TEM Daten sowie die SRIM Simulationen&lt;/p&gt;</description>
  </descriptions>
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