June 7, 2022 Dataset Open Access

Zhdanov, Maksim; Ganeva, Marina; Randolph, Lisa; Kluge, Thomas; Hoffmann, Nico

DCAT Export

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    <dct:title>Dataset for Inversion of GISAXS data (1 layer)</dct:title>
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    <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#gYear">2022</dct:issued>
    <dcat:keyword>GISAXS</dcat:keyword>
    <dcat:keyword>Inverse problems</dcat:keyword>
    <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#date">2022-06-07</dct:issued>
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    <dct:description>&lt;p&gt;The dataset consists of 50000 X-ray diffraction patterns simulated by BornAgain [1] software. For each simulation, a multilayer sample model of the following structure was used: air, tantalum oxide, silicon dioxide, and substrate. Parameters of each layer but tantalum oxide were kept fixed. Hence, each diffraction pattern depends on the parameters of the tantalum oxide layer: real and complex part of refractive index, thickness, roughness, Hurst parameter, and correlation length. Each simulation output is stored in an h5py file consisting of 1) diffraction image as a NumPy array of shape [1024, 512]; 2) sample parameters as a NumPy array with 6 elements. For further details regarding simulation, see https://github.com/maxxxzdn/gisaxs-reconstruction/simulation/simulation.&lt;/p&gt; &lt;p&gt;[1] Pospelov, G., Van Herck, W., Burle, J., Carmona Loaiza, J.M., Durniak, C., Fisher, J., Ganeva, M., Yurov, D., &amp;amp; Wuttke, J. (2020). BornAgain: software for simulating and fitting grazing-incidence small-angle scattering.&amp;nbsp;&lt;em&gt;Journal of Applied Crystallography, 53&lt;/em&gt;, 262 - 276.&lt;/p&gt;</dct:description>
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