June 7, 2022 Dataset Open Access

Zhdanov, Maksim; Ganeva, Marina; Randolph, Lisa; Kluge, Thomas; Hoffmann, Nico

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{
  "title": "Dataset for Inversion of GISAXS data (1 layer)", 
  "id": "1687", 
  "DOI": "10.14278/rodare.1687", 
  "author": [
    {
      "family": "Zhdanov, Maksim"
    }, 
    {
      "family": "Ganeva, Marina"
    }, 
    {
      "family": "Randolph, Lisa"
    }, 
    {
      "family": "Kluge, Thomas"
    }, 
    {
      "family": "Hoffmann, Nico"
    }
  ], 
  "publisher": "Rodare", 
  "abstract": "<p>The dataset consists of 50000 X-ray diffraction patterns simulated by BornAgain [1] software. For each simulation, a multilayer sample model of the following structure was used: air, tantalum oxide, silicon dioxide, and substrate. Parameters of each layer but tantalum oxide were kept fixed. Hence, each diffraction pattern depends on the parameters of the tantalum oxide layer: real and complex part of refractive index, thickness, roughness, Hurst parameter, and correlation length. Each simulation output is stored in an h5py file consisting of 1) diffraction image as a NumPy array of shape [1024, 512]; 2) sample parameters as a NumPy array with 6 elements. For further details regarding simulation, see https://github.com/maxxxzdn/gisaxs-reconstruction/simulation/simulation.</p>\n\n<p>[1] Pospelov, G., Van Herck, W., Burle, J., Carmona Loaiza, J.M., Durniak, C., Fisher, J., Ganeva, M., Yurov, D., &amp; Wuttke, J. (2020). BornAgain: software for simulating and fitting grazing-incidence small-angle scattering.&nbsp;<em>Journal of Applied Crystallography, 53</em>, 262 - 276.</p>", 
  "type": "dataset", 
  "issued": {
    "date-parts": [
      [
        2022, 
        6, 
        7
      ]
    ]
  }, 
  "version": "0.1"
}