Dataset Open Access
Data publication: Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission
Zotovich, Alexey I.;
Zyryanov, Sergey M.;
Lopaev, Dmitry V.;
Rezvanov, Askar A.;
Attallah, Ahmed Gamal;
Liedke, Maciej Oskar;
Butterling, Maik;
Bogdanova, Maria A.;
Vishnevskiy, Alexey S.;
Seregin, Dmitry S.;
Vorotyntsev, Dmitry A. Vorotyntsev;
Palov, Alexander P.;
Hirschmann, Eric;
Wagner, Andreas;
Naumov, Sergej;
Vorotilov, Konstantin A.;
Rakhimova, Tatyana V.;
Rakhimov, Alexander T. R.;
Baklanov, Mikhail
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- Publication date:
- January 11, 2023
- DOI:
-
- Keyword(s):
- ultralow-k materials vacuum ultraviolet emission porosimetry positron-annihilation spectroscopy in situ ellipsometry
- Related identifiers:
- Identical to:
https://www.hzdr.de/publications/Publ-36205 - Referenced by:
10.1021/acsaelm.2c00281, https://www.hzdr.de/publications/Publ-35036 - Communities:
- License (for files):
- Creative Commons Attribution 4.0 International