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Data publication: Prelithiation of silicon thin film anodes using ion implantation for lithium ion batteries

Cherkouk, Charaf; Ferch, Marc; Hahn, Robert; Weigel, Tina; Köhler, Thomas; Ludt, Christian; Stöcker, Hartmut; Delan, Annekatrin; Munnik, Frans; Kentsch, Ulrich; Folgner, Christoph; Schumann, Thomas; Begeza, Viktor; Cheng, Yu; Zhou, Shengqiang; Rebohle, Lars


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  "url": "https://rodare.hzdr.de/record/3818", 
  "name": "Data publication: Prelithiation of silicon thin film anodes using ion implantation for lithium ion batteries", 
  "@type": "Dataset", 
  "@id": "https://doi.org/10.14278/rodare.3818", 
  "creator": [
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      "affiliation": "Fraunhofer Institute for Reliability and Microintegration IZM", 
      "name": "Ferch, Marc"
    }, 
    {
      "@type": "Person", 
      "affiliation": "Fraunhofer Institute for Reliability and Microintegration IZM", 
      "name": "Hahn, Robert"
    }, 
    {
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      "affiliation": "Institute of Experimental Physics, Technische Universit\u00e4t Bergakademie Freiberg", 
      "name": "Weigel, Tina"
    }, 
    {
      "@type": "Person", 
      "affiliation": "Institute of Experimental Physics, Technische Universit\u00e4t Bergakademie Freiberg", 
      "name": "K\u00f6hler, Thomas"
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      "affiliation": "Institute of Experimental Physics, Technische Universit\u00e4t Bergakademie Freiberg", 
      "name": "Ludt, Christian"
    }, 
    {
      "@type": "Person", 
      "affiliation": "Institute of Experimental Physics, Technische Universit\u00e4t Bergakademie Freiberg", 
      "name": "St\u00f6cker, Hartmut"
    }, 
    {
      "@type": "Person", 
      "affiliation": "Fraunhofer Institute for Reliability and Microintegration, Institute of All Silicon System Integration Dresden IZM- ASSID", 
      "name": "Delan, Annekatrin"
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      "name": "Kentsch, Ulrich"
    }, 
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      "name": "Folgner, Christoph"
    }, 
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      "name": "Schumann, Thomas"
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      "name": "Begeza, Viktor"
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      "name": "Rebohle, Lars"
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  "keywords": [
    "lithium ion batteries", 
    "Prelithiation", 
    "silicon anode", 
    "ion implantation"
  ], 
  "sameAs": [
    "https://www.hzdr.de/publications/Publ-41492"
  ], 
  "datePublished": "2025-06-18", 
  "identifier": "https://doi.org/10.14278/rodare.3818", 
  "description": "<p>Satz von Daten der zyklierung von Batteriezellen als Excel- Datei, wie in der vorliegenden Publikation dargestellt und beschrieben sind.</p>"
}
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