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Data publication: Prelithiation of silicon thin film anodes using ion implantation for lithium ion batteries

Cherkouk, Charaf; Ferch, Marc; Hahn, Robert; Weigel, Tina; Köhler, Thomas; Ludt, Christian; Stöcker, Hartmut; Delan, Annekatrin; Munnik, Frans; Kentsch, Ulrich; Folgner, Christoph; Schumann, Thomas; Begeza, Viktor; Cheng, Yu; Zhou, Shengqiang; Rebohle, Lars


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