Dataset Open Access

Data publication: Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators

Bredol, Philipp; David, Felix; Jagtap, Nagesh; Astakhov, Georgy; Erbe, Artur; Weig, Eva M.; Klaß, Yannik


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@misc{bredol_philipp_2024_3024,
  author       = {Bredol, Philipp and
                  David, Felix and
                  Jagtap, Nagesh and
                  Astakhov, Georgy and
                  Erbe, Artur and
                  Weig, Eva M. and
                  Klaß, Yannik},
  title        = {{Data publication: Effect of Helium Ion 
                   Implantation on 3C-SiC Nanomechanical String
                   Resonators}},
  month        = jun,
  year         = 2024,
  doi          = {10.14278/rodare.3024},
  url          = {https://doi.org/10.14278/rodare.3024}
}
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