Dataset Open Access

Data publication: Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators

Bredol, Philipp; David, Felix; Jagtap, Nagesh; Astakhov, Georgy; Erbe, Artur; Weig, Eva M.; Klaß, Yannik

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Publication date:
June 17, 2024
DOI:
10.14278/rodare.3024

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10.14278/rodare.3024

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Keyword(s):
nanomechanics defects ion beam irradiation quantum sensors
Related identifiers:
Cites:
10.17815/jlsrf-3-159
Identical to:
https://www.hzdr.de/publications/Publ-39128
Referenced by:
https://www.hzdr.de/publications/Publ-38866
Communities:
License (for files):
Creative Commons Attribution 4.0 International

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Version 1 10.14278/rodare.3024 Jun 17, 2024
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