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Data publication: Programmable activation of quantum emitters in high-purity silicon with focused carbon ion beams

Hollenbach, Michael; Klingner, Nico; Mazarov, P.; Pilz, W.; Nadzeyka, A.; Mayer, F.; Abrosimov, N. V.; Bischoff, Lothar; Hlawacek, Gregor; Helm, Manfred; Astakhov, Georgy


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