Dataset Open Access
Hollenbach, Michael;
Klingner, Nico;
Mazarov, P.;
Pilz, W.;
Nadzeyka, A.;
Mayer, F.;
Abrosimov, N. V.;
Bischoff, Lothar;
Hlawacek, Gregor;
Helm, Manfred;
Astakhov, Georgy
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Hollenbach, Michael, Klingner, Nico, Mazarov, P., Pilz, W., Nadzeyka, A., Mayer, F., … Astakhov, Georgy. (2024). Data publication: Programmable activation of quantum emitters in high-purity silicon with focused carbon ion beams [Data set]. Rodare. http://doi.org/10.14278/rodare.2819