Dataset Open Access

Data publication: Programmable activation of quantum emitters in high-purity silicon with focused carbon ion beams

Hollenbach, Michael; Klingner, Nico; Mazarov, P.; Pilz, W.; Nadzeyka, A.; Mayer, F.; Abrosimov, N. V.; Bischoff, Lothar; Hlawacek, Gregor; Helm, Manfred; Astakhov, Georgy

Experimenta data

Files (28.8 MB)
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20220107_CeC-20-200V_5keV_constant.txt
md5:443b356a2c51e201e5ca756cdb4f8fa6
145.4 kB Download
20220107_CeC-20-200V_5keV_constant_ohne_artefakte-background.txt
md5:44690f5de6f02cf98f816a72b2e374d1
117.4 kB Download
20220107_CeC-20-200V_5keV_constant_ohne_artefakte.txt
md5:1b80cbf0edbe41f2ba75da116785632b
145.0 kB Download
20220107_CeC-200-250V_SEV_1200V.txt
md5:d384e6926f3f0499b131a9919ae1abf4
549.4 kB Download
CFIB_AB.opj
md5:3ee41f7a93134e9b17d8004fff2cdc2e
1.5 MB Download
Daten_Paul_20kV_3.txt
md5:6c46e343844ffbc31be5ac19dff41c12
28.0 kB Download
Daten_Paul_20kV_4.txt
md5:ff7bf54b0ddf9a54316d6cb009e8b520
29.3 kB Download
Fig2.opju
md5:10ba229c3f4bad6f3c02992e83bd2e71
165.7 kB Download
Fig3_all-3.opju
md5:5133de56013016ebe05ff3aeda19e7dc
25.1 MB Download
Fig4.opju
md5:944aaf3ef86eca74f526adcbadc6bc7b
272.9 kB Download
Fig5_analyses.opju
md5:17ad4e56cc1bc4fa8b7b59cab309d8a0
673.8 kB Download
PL - C implantation - 1E12_20keV.oggu
md5:2cdbd88801f6a7e74c87ddd2463dbc60
22.3 kB Download
PL - C implantation - 1E12_40keV.oggu
md5:c362b5437f9682912ab67cf97a5b0249
21.1 kB Download
PL - Si implantation.oggu
md5:14d47c707d0b7f41f3b029aa806f8f6b
22.4 kB Download
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