Dataset Open Access

Data publication: In-situ GISAXS observation of ion-induced nanoscale pattern formation on crystalline Ge(001) in the reverse epitaxy regime

Erb, Denise; Myint, Peco; Evans-Lutterodt, Kenneth; Ludwig, Karl; Facsko, Stefan


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{
  "description": "<p>experimental raw data: in-situ Grazing Incidence Small Angle X-ray Scattering (GISAXS), ex-situ Atomic Force Microscopy (AFM); simulated raw data: surface topography (RIDO)</p>", 
  "creator": [
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      "@id": "https://orcid.org/0000-0002-5831-7284", 
      "name": "Erb, Denise", 
      "@type": "Person"
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    {
      "affiliation": "Boston University; Argonne National Laboratory", 
      "name": "Myint, Peco", 
      "@type": "Person"
    }, 
    {
      "affiliation": "Brookhaven National Laboratory", 
      "name": "Evans-Lutterodt, Kenneth", 
      "@type": "Person"
    }, 
    {
      "affiliation": "Boston University", 
      "name": "Ludwig, Karl", 
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    }, 
    {
      "@id": "https://orcid.org/0000-0003-3698-3793", 
      "name": "Facsko, Stefan", 
      "@type": "Person"
    }
  ], 
  "datePublished": "2022-12-31", 
  "distribution": [
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  "@id": "https://doi.org/10.14278/rodare.1210", 
  "@type": "Dataset", 
  "url": "https://rodare.hzdr.de/record/1210", 
  "name": "Data publication: In-situ GISAXS observation of ion-induced nanoscale pattern formation on crystalline Ge(001) in the reverse epitaxy regime", 
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  "identifier": "https://doi.org/10.14278/rodare.1210", 
  "license": "https://creativecommons.org/licenses/by/4.0/legalcode"
}
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