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Data for: Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

Serralta Hurtado De Menezes, Eduardo; Klingner, Nico; Castro, Olivier de; Mousley, Michael; Eswara, Santhana; Duarte Pinto, Serge; Wirtz, Tom; Hlawacek, Gregor


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  <identifier identifierType="DOI">10.14278/rodare.516</identifier>
  <creators>
    <creator>
      <creatorName>Serralta Hurtado De Menezes, Eduardo</creatorName>
      <givenName>Eduardo</givenName>
      <familyName>Serralta Hurtado De Menezes</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-6254-022X</nameIdentifier>
      <affiliation>Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf</affiliation>
    </creator>
    <creator>
      <creatorName>Klingner, Nico</creatorName>
      <givenName>Nico</givenName>
      <familyName>Klingner</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-9539-5874</nameIdentifier>
      <affiliation>Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf</affiliation>
    </creator>
    <creator>
      <creatorName>Castro, Olivier de</creatorName>
      <givenName>Olivier de</givenName>
      <familyName>Castro</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-9968-6695</nameIdentifier>
      <affiliation>Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology</affiliation>
    </creator>
    <creator>
      <creatorName>Mousley, Michael</creatorName>
      <givenName>Michael</givenName>
      <familyName>Mousley</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-0968-4846</nameIdentifier>
      <affiliation>Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology</affiliation>
    </creator>
    <creator>
      <creatorName>Eswara, Santhana</creatorName>
      <givenName>Santhana</givenName>
      <familyName>Eswara</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0003-4151-2304</nameIdentifier>
      <affiliation>Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology</affiliation>
    </creator>
    <creator>
      <creatorName>Duarte Pinto, Serge</creatorName>
      <givenName>Serge</givenName>
      <familyName>Duarte Pinto</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-5205-5554</nameIdentifier>
      <affiliation>Photonis Netherlands B.V.</affiliation>
    </creator>
    <creator>
      <creatorName>Wirtz, Tom</creatorName>
      <givenName>Tom</givenName>
      <familyName>Wirtz</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-7912-5193</nameIdentifier>
      <affiliation>Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology</affiliation>
    </creator>
    <creator>
      <creatorName>Hlawacek, Gregor</creatorName>
      <givenName>Gregor</givenName>
      <familyName>Hlawacek</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-7192-716X</nameIdentifier>
      <affiliation>Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf</affiliation>
    </creator>
  </creators>
  <titles>
    <title>Data for: Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector</title>
  </titles>
  <publisher>Rodare</publisher>
  <publicationYear>2020</publicationYear>
  <subjects>
    <subject>helium ion microscopy</subject>
    <subject>scanning transmission ion microscopy</subject>
    <subject>delay line detector</subject>
    <subject>channeling</subject>
    <subject>bright field</subject>
    <subject>dark field</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2020-09-09</date>
  </dates>
  <language>en</language>
  <resourceType resourceTypeGeneral="Dataset"/>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://rodare.hzdr.de/record/516</alternateIdentifier>
  </alternateIdentifiers>
  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="Cites">10.17815/jlsrf-3-159</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsReferencedBy">10.3762/bjnano.11.167</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsReferencedBy">https://www.hzdr.de/publications/Publ-31506</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsIdenticalTo">https://www.hzdr.de/publications/Publ-31631</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.14278/rodare.515</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/ecfunded</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/fwi</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://rodare.hzdr.de/communities/rodare</relatedIdentifier>
  </relatedIdentifiers>
  <version>V1</version>
  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/1.0/legalcode">Creative Commons Attribution 1.0 Generic</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;&amp;nbsp; A detection system based on a microchannel plate with a delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium ion microscope (HIM). This system is an improvement over other existing approaches since it combines the information of the scanning beam position on the sample with the position (scattering angle) and time of the transmission events. Various imaging modes such as bright and dark field or the direct image of the transmitted signal can be created by post-processing the collected STIM data. Furthermore, the detector has high spatial and time resolution, is sensitive to both ions and neutral particles over a wide energy range, and shows robustness against ion beam-induced damage. A special in-vacuum movable support gives the possibility of moving the detector vertically, placing the detector closer to the sample for the detection of high-angle scattering events, or moving it down to increase the angular resolution and distance for time-of-flight measurements. With this new system, we show composition-dependent contrast for amorphous materials and the contrast difference between small and high angle scattering signals. We also detect channeling related contrast on polycrystalline silicon, thallium chloride nanocrystals, and single crystalline silicon by comparing the signal transmitted at different directions for the same data set.&lt;/p&gt;</description>
  </descriptions>
  <fundingReferences>
    <fundingReference>
      <funderName>European Commission</funderName>
      <funderIdentifier funderIdentifierType="Crossref Funder ID">10.13039/501100000780</funderIdentifier>
      <awardNumber awardURI="info:eu-repo/grantAgreement/EC/H2020/720964/">720964</awardNumber>
      <awardTitle>The nanoparticle-scope : a new integrated instrument for accurate and reproducible physico-chemical characterisation of nanoparticles (npSCOPE)</awardTitle>
    </fundingReference>
  </fundingReferences>
</resource>
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