June 6, 2023 Dataset Open Access

Attallah, Ahmed G.; Prucnal, Slawomir; Butterling, Maik; Hirschmann, Eric; Koehler, Nicole; Schulz, S. E.; Wagner, Andreas; Liedke, Maciej Oskar

DataCite XML Export

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  <identifier identifierType="DOI">10.14278/rodare.2324</identifier>
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      <creatorName>Attallah, Ahmed G.</creatorName>
      <givenName>Ahmed G.</givenName>
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      <creatorName>Prucnal, Slawomir</creatorName>
      <givenName>Slawomir</givenName>
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      <creatorName>Butterling, Maik</creatorName>
      <givenName>Maik</givenName>
      <familyName>Butterling</familyName>
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    <creator>
      <creatorName>Hirschmann, Eric</creatorName>
      <givenName>Eric</givenName>
      <familyName>Hirschmann</familyName>
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    <creator>
      <creatorName>Koehler, Nicole</creatorName>
      <givenName>Nicole</givenName>
      <familyName>Koehler</familyName>
      <affiliation>Chemnitz University of Technology, Center for Microtechnologies, 09107, Chemnitz, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Schulz, S. E.</creatorName>
      <givenName>S. E.</givenName>
      <familyName>Schulz</familyName>
      <affiliation>Chemnitz University of Technology, Center for Microtechnologies, 09107, Chemnitz, Germany</affiliation>
    </creator>
    <creator>
      <creatorName>Wagner, Andreas</creatorName>
      <givenName>Andreas</givenName>
      <familyName>Wagner</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-7575-3961</nameIdentifier>
    </creator>
    <creator>
      <creatorName>Liedke, Maciej Oskar</creatorName>
      <givenName>Maciej Oskar</givenName>
      <familyName>Liedke</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0001-7933-7295</nameIdentifier>
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  </creators>
  <titles>
    <title>Data publication: Millisecond Flash Lamp Curing for Porosity Generation in Thin Films</title>
  </titles>
  <publisher>Rodare</publisher>
  <publicationYear>2023</publicationYear>
  <dates>
    <date dateType="Issued">2023-06-06</date>
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    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsReferencedBy">10.1038/s41598-023-34748-x</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsIdenticalTo">https://www.hzdr.de/publications/Publ-37073</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsReferencedBy">https://www.hzdr.de/publications/Publ-36933</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.14278/rodare.2323</relatedIdentifier>
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  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;Research data of Millisecond Flash Lamp Curing for Porosity Generation in Thin Films&lt;/p&gt;</description>
  </descriptions>
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