January 11, 2023 Dataset Open Access

Xie, Yufang; Li, Zichao; Begeza, Viktor; Funk, Hannes Simon; Fischer, Inga Anita; Zeng, Yu-Jia; Helm, Manfred; Zhou, Shengqiang; Prucnal, Slawomir

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{
  "name": "Data publication: Influence of fabrication parameters on the magnetic and structural properties of Mn5Ge3", 
  "description": "<p>XRD, RBS, el. transport and VSM measurements of fabricated Mn5Ge3 layers on Ge &lt;111&gt; substrates.</p>", 
  "datePublished": "2023-01-11", 
  "citation": [
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      "name": "Xie, Yufang", 
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    {
      "name": "Li, Zichao", 
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    {
      "name": "Begeza, Viktor", 
      "@type": "Person"
    }, 
    {
      "affiliation": "Institut f\u00fcr Halbleitertechnik, Universit\u00e4t Stuttgart, Stuttgart, 70569, Germany", 
      "name": "Funk, Hannes Simon", 
      "@id": "https://orcid.org/0000-0001-8485-2400", 
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    }, 
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      "affiliation": "Institut f\u00fcr Halbleitertechnik, Universit\u00e4t Stuttgart, Stuttgart, 70569, Germany", 
      "name": "Fischer, Inga Anita", 
      "@type": "Person"
    }, 
    {
      "affiliation": "College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, 518060, China", 
      "name": "Zeng, Yu-Jia", 
      "@id": "https://orcid.org/0000-0001-5673-3447", 
      "@type": "Person"
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    {
      "name": "Helm, Manfred", 
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    {
      "name": "Zhou, Shengqiang", 
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      "@type": "Person"
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      "name": "Prucnal, Slawomir", 
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  "url": "https://rodare.hzdr.de/record/2068", 
  "@type": "Dataset", 
  "@id": "https://doi.org/10.14278/rodare.2068", 
  "distribution": [
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  "identifier": "https://doi.org/10.14278/rodare.2068", 
  "sameAs": [
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  "keywords": [
    "solid phase epitaxy", 
    "flash lamp annealing", 
    "ferromagnetic film", 
    "spintronic", 
    "fabrication parameter", 
    "structural property"
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  "license": "https://creativecommons.org/licenses/by/4.0/legalcode"
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