{"text_format":"3","workbook":"xls","n_sheets":1,"sheets":["Spectrum"],"read":"whole","date_system":"1900","formulas":"cached_only"}

{"sheet":"Spectrum","index":0,"n_rows":4121,"n_cols":5,"rows_kept":4121,"flags":["formulas_cached_only"]}
["Bruker Nano GmbH Berlin, Germany",{"$nulls":3},"30.06.2023"]
[]
[null,"Esprit"]
[]
["Spectrum: ","Pos02.spx"]
["Date: ","30.06.2023"]
[]
["Primary energy: ",null,15,"keV"]
["Tilt angle: ",null,0,"°"]
["Take off angle: ",null,35,"°"]
["Azimut angle: ",null,0,"°"]
["Real time: ",null,120000,"ms"]
["Life time: ",null,118552,"ms"]
["Detector type: ",null,"Custom type"]
["Si dead layer:",null,0.08,"µm"]
["Detector thickness: ",null,0.45,"mm"]
["Window type: ",null,"slew AP3.3"]
["Fano factor: ",null,0.11200000000324793]
["Mn FWHM: ",null,127.47685489202645,"eV"]
["Calibration, lin.: ",null,5.0005,"eV"]
["Calibration, abs.: ",null,-478.397835,"eV"]
["Channels: ",null,4096]
[]
[]
["Channel","Energy","Counts"]
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