2026-07-18T22:13:09Z
https://rodare.hzdr.de/oai2d
oai:rodare.hzdr.de:2819
2024-09-02T06:25:47Z
openaire_data
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3.1
HZDR.RODARE
10.14278/rodare.2819
Hollenbach, Michael
Klingner, Nico
0000-0001-9539-5874
Mazarov, P.
Raith GmbH, 44263 Dortmund, Germany
Pilz, W.
Raith GmbH, 44263 Dortmund, Germany
Nadzeyka, A.
Raith GmbH, 44263 Dortmund, Germany
Mayer, F.
Raith GmbH, 44263 Dortmund, Germany
Abrosimov, N. V.
Leibniz-Institut für Kristallzüchtung (IKZ), 12489 Berlin, Germany
Bischoff, Lothar
0000-0003-3968-7498
Hlawacek, Gregor
0000-0001-7192-716X
Helm, Manfred
Astakhov, Georgy
0000-0003-1807-3534
Data publication: Programmable activation of quantum emitters in high-purity silicon with focused carbon ion beams
Rodare
2024
Single photon emitters
Quantum technologies
Ion implantation
Silicon
2024-04-29
https://rodare.hzdr.de/record/2819
10.17815/jlsrf-3-159
https://www.hzdr.de/publications/Publ-39026
https://www.hzdr.de/publications/Publ-39025
10.14278/rodare.2818
https://rodare.hzdr.de/communities/fwi
https://rodare.hzdr.de/communities/ibc
https://rodare.hzdr.de/communities/rodare
Creative Commons Attribution 4.0 International
Open Access
<p>Experimenta data</p>