2026-06-17T00:58:12Z https://rodare.hzdr.de/oai2d

oai:rodare.hzdr.de:250 2024-08-13T12:23:06Z openaire_data user-ecfunded user-fwi user-rodare user-ibc

true 3.1 HZDR.RODARE 10.14278/rodare.250 Hlawacek, Gregor 0000-0001-7192-716X Helmholtz-Zentrum Dresden - Rossendorf Andany, Santiago 0000-0003-2281-7612 EPFL Rodare 2020 Helium Ion Microscopy Atomic Force Microscopy Hummel, Stefan GETec Fantner, Georg EPFL European Commission info:eu-repo/grantAgreement/EC/H2020/688072/ 2020-02-04 https://rodare.hzdr.de/record/250 https://www.hzdr.de/publications/Publ-30718 https://www.hzdr.de/publications/Publ-30689 10.14278/rodare.249 https://rodare.hzdr.de/communities/ecfunded https://rodare.hzdr.de/communities/fwi https://rodare.hzdr.de/communities/ibc https://rodare.hzdr.de/communities/rodare Closed Access <p>In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope<br> (HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-<br> nanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established<br> versatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for<br> unprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be<br> performed without contamination of the sample as well as avoiding environmental changes between<br> processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as<br> the AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect<br> way---but also allows for nanomechanical property mapping, as well as electrical and magnetic<br> characterisation of the sample after focused ion beam materials modification with the HIM. The<br> experimental setup is described and evaluated through a series of correlative experiments, demonstrating<br> the feasibility of the integration.</p>